A. А. Goncharov, A. N. Evsyukov, E. G. Kostin, B. V. Stetsenko, E. K. Frolova, A. I. Shchurenko, “Synthesis of nanocrystalline titanium dioxide films in a cylindrical magnetron-type gas discharge and their optical characterization”, Zhurnal Tekhnicheskoi Fiziki, 2010, Volume 80, Issue 8,Pages <nobr>127

This article is cited in 11 papers

Surfaces, Electron and Ion Emission

Synthesis of nanocrystalline titanium dioxide films in a cylindrical magnetron-type gas discharge and their optical characterization

A. А. Goncharov^a, A. N. Evsyukov^a, E. G. Kostin^b, B. V. Stetsenko^a, E. K. Frolova^a, A. I. Shchurenko^a

^a Institute of Physics, National Academy of Sciences of Ukraine, Kiev
^b Institute for Nuclear Research of the National Academy of Sciences of Ukrainian

Abstract: The plasma-dynamic and spectral characteristics of a cylindrical magnetron-type gas discharge are studied experimentally. The radiation spectrum of the plasma is recorded in real time in the range 350–820 nm. Appropriate conditions for synthesis of TiO$_2$ binary compound are found. They are provided by maintaining the intensities of the spectral lines of reactants and a plasma-forming gas at a desired level. The feasibility of monitoring the TiO$_2$ film synthesis conditions from the spectral characteristics of the discharge plasma and from the variation of the discharge voltage is considered. Ellipsometric and spectral data for nanocrystalline titanium dioxide films indicate that the refractive index of the film depends on its thickness.

Received: 12.01.2010