This article is cited in 28 papers

Solid-State Electronics

Multilayer X-ray mirrors based on La/B$_4$C and La/B$_9$C

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, D. N. Rogachev, N. N. Salashchenko, Yu. A. Vainer, S. Yu. Zuev

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod

Abstract: Multilayer X-ray mirrors that are based on La/B$_4$C and La/B$_9$C and intended for the reflection of X-ray radiation in the spectral region near $\lambda$ = 6.7 nm are prepared and studied. Reflection coefficients at a level of 40–60% are achieved for mirrors with various periods. The difference in the interlayer roughnesses reconstructed from the data measured in the hard and soft X-ray spectral regions is explained using a structural model with an asymmetric permittivity profile in a mirror period. A proximate technique is developed to estimate the permittivity profile in a multilayer-structure period using reflectometry data. The effect of antidiffusion Sn, Cr, and Mo barriers on the reflection coefficient of multilayer La/B$_4$C structures is studied experimentally.

Received: 23.09.2009

 English version: Technical Physics, 2010, 55:8, 1168–1174

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