V. M. Beresnev, O. V. Sobol', A. D. Pogrebnyak, P. V. Turbin, S. V. Litovchenko, “Thermal stability of the phase composition, structure, and stressed state of ion-plasma condensates in the Zr–Ti–Si–N system”, Zhurnal Tekhnicheskoi Fiziki, 2010, Volume 80, Issue 6,Pages <nobr>117

This article is cited in 20 papers

Brief Communications

Thermal stability of the phase composition, structure, and stressed state of ion-plasma condensates in the Zr–Ti–Si–N system

V. M. Beresnev^abcde, O. V. Sobol'^abcde, A. D. Pogrebnyak^abcde, P. V. Turbin^abcde, S. V. Litovchenko^abcde

^a Scientific Center of Physics and Technology of the Ministry of Education and Science of Ukraine and National Academy of Sciences of Ukraine
^b Khar'kov Polytechnical University
^c Sumy Institute for Surface Modification
^d V. N. Karazin Kharkiv National University
^e Sumy National Agrarian University, Sumy, 40021, Ukraine

Abstract: The results of studying the effect of high-tempera ture annealing in vacuum and in air on the phase composition, structure, and stressed state of ion-plasma condensates in the Zr–Ti–Si–N system are reported. In going from air annealing to vacuum annealing, the amount of active oxygen atoms decreases and the phase composition of the condensate remains stable to 1000$^\circ$C or higher. A change in the crystal phase composition shows up, for the first place, in the crystallization of silicon nitride with the intense formation of hexagonal $\beta$-Si$_3$N$_4$ crystallites and also in the feeble formation of ZrO$_2$ dioxide. The latter process does not lead to the decomposition of the (Zr, Ti)N solid solution: it merely increases the partial concentration of the titanium component.

Received: 27.03.2009