This article is cited in 1 paper

Gases and Fluids

On the formation of a wavy microrelief on an ion-beam-sputtered semiconductor surface

A. I. Grigor'ev

P.G. Demidov Yaroslavl State University

Abstract: A mathematical model of regular wavy microrelief formation on a semiconductor surface subjected to an obliquely incident medium-energy ion be am is stated and analyzed. Taking into account the influence of fluctuation forces (the molecular component of the disjoining pressure) and of the ion-beam-transferred electric charge is shown to bring together model predictions and observations.

Received: 10.09.2009

 English version: Technical Physics, 2010, 55:6, 789–794

Bibliographic databases:

•