This article is cited in 2 papers

Gas Discharges, Plasmas

Probe studies of laser erosion plume arising at silicon ablation in vacuum

E. V. Khaidukov, O. A. Novodvorskii, A. A. Lotin, V. V. Rocheva, O. D. Khramova, V. Ya. Panchenko

Institute on Laser and Information Technologies, Russian Academy of Scienses, Shatura, Moskovskaya obl.

Abstract: An erosion plume arising at the ablation of silicon by a solid-state laser ($\lambda$ = 1.06 $\mu$m) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes.

Received: 28.05.2009

 English version: Technical Physics, 2010, 55:4, 491–495

Bibliographic databases:

•