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Zhurnal Tekhnicheskoi Fiziki, 2012 Volume 82, Issue 6, Pages 69–72 (Mi jtf8845)

This article is cited in 10 papers

Optics, Quantum Electronics

Optical-pyrometric diagnostics of the state of silicon during nanopulsed laser irradiation

G. D. Ivlev, E. I. Gatskevich

B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, Minsk

Abstract: The dynamics of the reflectivity at $\lambda$ = 0.53 $\mu$m and the IR radiation of silicon in the wavelength range 0.9–1.2 $\mu$m is studied under the action of nanosecond ruby laser radiation pulses. When radiation energy density W is lower than the threshold of laser-induced melting of the surface of a semiconductor crystal, the major contribution to the IR radiation emitted by this crystal is made by edge photoluminescence. As the melting threshold is exceeded, the nanosecond dynamics of the detected IR radiation changes from photoluminescence to the thermal radiation of the forming Si phase melt with a high reflectivity. The results of pyrometric measurements of the peak melt surface temperature as a function of W obtained at an effective wavelength $\lambda_e$ = 1.04 $\mu$m of the detected IR radiation agree with the data of analogous measurements performed at $\lambda_e$ = 0.53 and 0.86 $\mu$m.

Received: 24.05.2011


 English version:
Technical Physics, 2012, 57:6, 803–806

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