Abstract:
The results of simulating the Holweck pump by numerically solving the Boltzmann kinetic equation are reported. The nonlinear collision integral is calculated using the conservative projection method. The translation operator is approximated with tetrahedral grids. The ratio of pressures in pumped-in and pumpedout containers is studied as a function of the gas density (rarefaction) and the radius and rotation velocity of the rotor at Knudsen numbers close to unity.