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Brief Communications

Production of high-quality metal-coated pyroelectric SrTiO$_3$ films

A. Yoffe, H. Cohen, V. Shelukhin

Weizmann Institute of Science, Rehovot, 76100, Israel

Abstract: A procedure for the production of metal-coated quasi-amorphous pyroelectric thin SrTiO$_3$ films is described. The films are grown in a modified 306 Edwards magnetron sputtering setup under controlled thermal conditions and stabilized high-accuracy vacuum and gas pressure conditions. Three-layer 200 nm metal-100 nm SrTiO$_3$-100 nm metal films are studied. The pyroelectric nature of the electric response of these films to heating is directly established, since metallic contacts made from the same material do not distort the measurement results, which excludes the effect of a contact potential difference on the measurement results.

Received: 24.01.2011
Accepted: 05.11.2011

 English version: Technical Physics, 2012, 57:1, 134–136

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