This article is cited in 7 papers

Experimental instruments and technique

Investigation of supersmooth optical surfaces and multilayer elements using soft X-ray radiation

M. M. Barysheva, Yu. A. Vainer, B. A. Gribkov, M. V. Zorina, A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo, A. V. Shcherbakov

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod

Abstract: The aim of this work is application of soft X-ray diffuse scattering for certification of diffractiongrade optical elements and their substrates at a working wavelength. A device is suggested that allows certification under laboratory conditions owing to a dynamic range approaching that of synchrotron radiation sources. Experimental data are compared with data of alternative methods.

Received: 16.11.2012

 English version: Technical Physics, 2013, 58:9, 1371–1379

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