Abstract:
The Raman spectra of thin ($d$ = 60–170 nm) Ge-Se polycrystalline films obtained by vacuum thermal evaporation of Ge$_{10}$Se$_{90}$ glass are investigated in the spectral range 110–310 cm$^{-1}$. The coexistence of the glasslike and crystalline phases $\alpha$-Se, $\beta$-Se, and $\beta$-GeSe$_2$ is established using the X-ray diffraction method. Analysis of diffraction patterns and the Raman spectra of polycrystalline samples of various thicknesses demonstrates a phase size effect in the transition of Se from the $\alpha$-monoclinic to the $\beta$ monoclinic modification ($d\sim$ 120 nm). It is found that the crystalline phase of Se is of the nanodisperse type with an average grain size of $\sim$ 30–50 nm. Crystallites of $\beta$-GeSe$_2$ have an average size of $\sim$ 100–130 nm.