XXIX Symposium "Nanophysics and Nanoelectronics" in Nizhny Novgorod, March 10-14, 2025
Physics of nanostructures

Structural and reflective characteristics of Cr/C multilayer mirrors synthesized by reactive sputtering method

R. A. Shaposhnikov, S. A. Garakhin, V. N. Polkovnikov, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod

Abstract: The paper presents the results of a study of the reflective characteristics and structural parameters of multilayer X-ray mirrors based on a pair of Cr/C materials optimized for the spectral range of wavelengths of 44 – 66 $\mathring{\mathrm{A}}$. The article also presents the results of a study of Cr/C structures synthesized in an argon + nitrogen gas mixture.

Keywords: multilayer x-ray mirrors, magnetron sputtering, X-ray microscopy, carbon transparency window, biological research.

Received: 29.05.2025
Revised: 29.05.2025
Accepted: 29.05.2025

DOI: 10.61011/JTF.2025.09.61243.123-25

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