Abstract:
In this work the images of an argon spark in the extreme ultraviolet (EUV) range obtained using an EUV microscope with an operating wavelength of 11.25 nm were studied. The gas target formed by the gas jet flowing into a vacuum chamber from a conical supersonic nozzle at a gas pressure of 3–10 bar at the nozzle inlet. An Nd:YAG laser ($\lambda$ = 1064 nm, $\tau_{imp}$ = 4.2 ns) with a pulse energy of 0.4–0.8 J was used for excitation. Image processing was carried out using the inverse Abel transform method due to the presence of axial symmetry of the spark relative to the laser beam axis. As a result of the work, radial distributions of radiating centers in an argon spark at a wavelength of 11.25 nm were obtained for various excitation parameters.
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