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Zhurnal Tekhnicheskoi Fiziki, 2014 Volume 84, Issue 12, Pages 126–131 (Mi jtf8291)

This article is cited in 8 papers

Physical electronics

Dissolution of a silver film in silicon glasses under electron bombardment

V. S. Brunova, O. A. Podsvirovb, A. I. Sidorova, M. A. Prosnikovb

a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
b Peter the Great St. Petersburg Polytechnic University

Abstract: It is shown that the under the action of an electron beam with electron energy $E >$ 10 keV and electron irradiation dose $Q\ge$ 20 mQ/cm$^2$ on silicate glasses coated with a silver film 80–100 nm in thickness, the silver film is dissolved partially or completely. The main mechanisms inducing this effect are the formation of a negative space charge under the glass surface, field emission of positive silver ions from the field, and migration of silver ions to the space charge region.

Received: 19.03.2014


 English version:
Technical Physics, 2014, 59:12, 1863–1868

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