This article is cited in 8 papers

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Hard carbon coatings deposited by pulsed high current magnetron sputtering

K. V. Oskomov, A. A. Solov'ev, S. V. Rabotkin

Institute of High Current Electronics, Siberian Branch of the Russian Academy of Sciences, Tomsk

Abstract: Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 $\mu$m$^3$N$^{-1}$m$^{-1}$, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 10$^{13}$ cm$^{-3}$) plasma.

Received: 13.03.2014

 English version: Technical Physics, 2014, 59:12, 1811–1814

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