This article is cited in 3 papers

Plasma

Simple analytic relations for estimating parameters of the positive column of an electronegative glow discharge in a halogen-containing gas mixture

A. P. Golovitskiĭ

Peter the Great St. Petersburg Polytechnic University

Abstract: Asymptotic analysis of the continuity equations for the positive charge plasma of a low- and moderate-pressure dc electronegative discharge is performed under the simple assumption of independence of the rates of plasma-chemical processes from coordinates. As a novelty, the ion diffusion is taken into account for the case when the ion-ion recombination dominates among the perishing mechanism of negative ions. The resultant simple analytic expressions make it possible to estimate (with an error not exceeding 15–25%) the geometrical parameters of spatial distributions of charged particle concentrations in this plasma, as well as the energy parameters, without resorting to complicated numerical simulation.

Received: 25.10.2013

 English version: Technical Physics, 2014, 59:11, 1599–1609

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