This article is cited in 7 papers

Brief Communications

Magnetron sputtering of thin Cu(200) films on Ni(200)/SiO$_2$/Si substrates

A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov

Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences

Abstract: The possibility of oriented growth of thin copper films with a (200) texture on a SiO$_2$/Si substrate by magnetron sputtering in medium vacuum is demonstrated for the case when a predeposited nickel layer with a (200) texture serves as an orienting sublayer.

Received: 19.12.2013

 English version: Technical Physics, 2014, 59:7, 1097–1100

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