Abstract:
The surface morphology and electronic properties of nanocrystalline phases and 2–7-nm-thick Ga$_{1-x}$Al$_x$As films grown on the GaAs(111) surface by Al$^+$ ion implantation with subsequent (laser + thermal) annealing are studied. It is found that bandgap $E_g$ of the Ga$_{0.5}$Al$_{0.5}$As nanocrystalline surface phase 25–30 nm in size equals 2.8–2.9 eV.