S. Yu. Kupreenko, N. A. Orlikovsky, E. I. Rau, A. M. Tagachenkov, A. A. Tatarintsev, “Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons”, Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 85, Issue 10,Pages <nobr>101

This article is cited in 6 papers

Physics of nanostructures

Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons

S. Yu. Kupreenko^a, N. A. Orlikovsky^b, E. I. Rau^a, A. M. Tagachenkov^c, A. A. Tatarintsev^b

^a Lomonosov Moscow State University
^b Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
^c Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences

Abstract: A new method for determining the thickness of opaque films on bulk substrates is considered in the nanometer size range. The method is based on analysis and measurements of the energy spectra of back-scattered electrons. The thicknesses of local film nanostructures are determined from the amplitude values of the spectra and from their shift on the energy axis.

Received: 19.02.2015