I. A. Averin, S. E. Igoshina, V. A. Moshnikov, A. A. Karmanov, I. A. Pronin, E. I. Terukov, “Sensitive elements of vacuum sensors based on porous nanostructured SiO$_2$–SnO$_2$ sol-gel films”, Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 85, Issue 6,Pages 143

This article is cited in 10 papers

Experimental instruments and technique

Sensitive elements of vacuum sensors based on porous nanostructured SiO$_2$–SnO$_2$ sol-gel films

I. A. Averin^a, S. E. Igoshina^a, V. A. Moshnikov^b, A. A. Karmanov^a, I. A. Pronin^a, E. I. Terukov^c

^a Penza State University
^b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
^c Ioffe Institute, St. Petersburg

Abstract: The objects of investigation are porous nanostructured SiO$_2$–SnO$_2$ sol-gel films used as sensitive elements on vacuum sensors. The properties of the films with spherical, labyrinth, and percolation mesh structures are analyzed. It is shown that the resistance of sensitive elements based on these films sharply drops at a pressure below the atmospheric value. Processes taking place in the films at subatmospheric pressures are studied. It is found that the desorption of water vapor increases the resistance of the sensitive elements of vacuum sensors, whereas the desorption of carbon dioxide and oxygen decreases the resistance. This agrees with experimental data.

Received: 20.10.2014