This article is cited in 17 papers

Physics of nanostructures

Thermal oxidative degradation of molybdenum films under laser ablation

A. V. Volkov^ab, N. L. Kazanskii^ab, O. Yu. Moiseev^a, S. D. Poletayev<sup>ab

a</sup> Image Processing Systems Institute, Russian Academy of Sciences, Samara
^b Samara State Aerospace University

Abstract: The problems of laser ablation of molybdenum films that are related to the formation of topological patterns of contact masks are discussed. The thermal oxidative degradation of thin molybdenum films under high-intensity laser irradiation is analyzed. The results of theoretical estimations are compared with the Raman data on the chemical composition of molybdenum oxide.

Received: 30.04.2014

 English version: Technical Physics, 2015, 60:2, 265–269

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