Physical electronics

Influence of magnetron sputtering modes on properties of protective Ti–Al–Ta–N coatings

A. Yu. Derbin, A. R. Shugurov, E. D. Kuz'minov, A. V. Panin

Institute of Strength Physics and Materials Science, Siberian Branch of the Russian Academy of Sciences, Tomsk

Abstract: Applying of protective coatings is an effective way to increase the resistance of various parts and components against wear, oxidation and corrosion. In this article a comparative analysis of Ti–Al–Ta–N coatings obtained by high-power impulse magnetron sputtering and direct current magnetron sputtering is carried out. It is shown that the use of the combined sputtering mode can significantly increase the deposition rate. The influence of the deposition modes and the multilayer architecture of these coatings on their mechanical and tribological characteristics, as well as oxidation resistance, is investigated. It is established that optimization of the architecture of the Ti–Al–Ta–N multilayer coatings makes it possible to increase their hardness and wear resistance, but it has almost no effect on their oxidation resistance.

Keywords: Ti–Al–Ta–N coatings, magnetron sputtering, mechanical properties, oxidation resistance.

Received: 28.01.2025
Revised: 12.03.2025
Accepted: 27.03.2025

DOI: 10.61011/JTF.2025.08.60908.12-25

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