RUS  ENG
Full version
JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive

Zhurnal Tekhnicheskoi Fiziki, 2025 Volume 95, Issue 8, Pages 1598–1609 (Mi jtf7646)

Physical electronics

The influence of ionic and acid etching on the structural and magnetic resonance characteristics of epitaxial iron-garnet films

A. A. Syrov, S. V. Tomilin, E. Yu. Semuk, S. V. Osmanov

V. I. Vernadsky Crimean Federal University, Simferopol

Abstract: The paper presents experimental results of a study of the post-treatment influence on thin monocrystalline films of cation-substituted iron-garnets on their structural and magnetic characteristics. It is shown that acid etching of the monocrystalline garnets surfaces is inferior to the ion-plasma etching method in the quality of surface treatment. When studying the morphology of the surface layer and ferromagnetic resonance spectra in an epitaxial iron-garnet film, it was shown that the use of orthophosphoric acid as an etchant leads to a decrease in surface roughness, but it does not provide to qualitative saving of magnetic characteristics compared with the ion-plasma treatment method, which does not worsen a structure and not destroy the garnet crystalline lattice.

Keywords: ion etching, acid etching, iron-garnet, ferromagnetic resonance, edge profile, masking.

Received: 29.10.2024
Revised: 20.03.2025
Accepted: 03.04.2025

DOI: 10.61011/JTF.2025.08.60907.374-24



Bibliographic databases:


© Steklov Math. Inst. of RAS, 2026