This article is cited in 4 papers

Physical electronics

Methods for the study and control of microplasma processes in the synthesis of coatings

A. I. Mamaev, V. A. Mamaeva, Yu. N. Bespalova

Tomsk State University, 634050 Tomsk, Russia

Abstract: The physical bases for determining the ignition and quenching potentials of microplasma discharges in solutions have been developed. Chronopotentiometric, chronoamperometric dependences on the conditions for obtaining coatings and the dependence of the time constant of the transient process on the voltage and duration of the process, as well as current-voltage dependences at the rates of rise and fall of the potential voltage from 10$^6$ to 10$^8$ V/s, are obtained. The developed method is applicable to control the process of deposition of microplasma non-metallic inorganic coatings and is the basis of the technique for in situ control of coating deposition.

Keywords: pulsed microplasma oxidation, current-voltage dependences, controlled synthesis of oxide coatings.

Received: 08.04.2022
Revised: 24.05.2022
Accepted: 28.05.2022

DOI: 10.21883/JTF.2022.09.52937.90-22

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