XXVI International Symposium "Nanophysics and nanoelectronics", N.Novgorod, 14 - 17 March 2022
Physical Electronics

Diamond-carbide-silicon composite “skeleton” as a promising material for X-ray optical substrates

M. V. Zorina^a, M. S. Mikhailenko^a, A. E. Pestov^a, M. N. Toropov^a, A. K. Chernyshev^a, N. I. Chkhalo^a, S. K. Gordeev^b, V. V. Vitkin<sup>c

a</sup> Institute for Physics of Microstructures, Russian Academy of Sciences, 603087 Nizhny Novgorod, Russia
^b CSRI of materials, 191014 St Petersburg, Russia
^c ITMO University, 197101 St Petersburg, Russia

Abstract: The paper proposes the use of diamond-carbide-silicon composite “Skeleton” $\circledR$ coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS$_{90\%}$ = 54.2 nm; effective roughness $\sigma_{\mathrm{eff}}$ $\sim$ 1.0 nm; high-frequency roughness $\sigma_{2\times2}$ $\sim$ 0.1 nm.

Keywords: X-ray optics, X-ray mirrors, substrates for X-ray mirrors, roughness.

Received: 06.04.2022
Revised: 06.04.2022
Accepted: 06.04.2022

DOI: 10.21883/JTF.2022.08.52790.85-22

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