This article is cited in 1 paper

XXVI International Symposium "Nanophysics and nanoelectronics", N.Novgorod, 14 - 17 March 2022
Solid State

Search for high-strength multilayer free-standing film filters with high transmittance in the wavelength range of the “water window” (2.3–4.4 nm)

M. M. Barysheva, S. A. Garakhin, A. Ya. Lopatin, V. I. Luchin, I. V. Malyshev, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, 603950 Nizhny Novgorod, Russia

Abstract: Some variants of the composition of multilayer absorption film filters with a high transmittance in the spectral region of the “water window” (2.3–4.4 nm) have been considered. Having created an ultimate pressure difference between the sides of free-standing films at which they are damaged, we compared the strength of 100 nm thick Ti-based multilayer filters with Al, Be, C interlayers and 100 nm thick V-based multilayer filters with Al interlayers. Sc and Cr was also considered as interlayers. Among the tested periodic multilayer structures, the best strength characteristics were demonstrated by Ti/Be (with a fraction of Ti in a period of about 0.6) and V/Al (with a fraction of V in a period of about 0.4) multilayer filters. Despite the fact that Ti/Be and V/Al filters are inferior in strength to Ti and V monolayer filters of the same thickness, these multilayer filters may be of interest, since they have either a higher transmittance in the “water window” (Ti/Be) or more high level of blocking of visible radiation (V/Al).

Keywords: spectral region of the “water window” multilayer free-standing filters, ultimate pressure difference, film filter strength, transmittance in the soft X-ray, visible light blocking level.

Received: 11.05.2022
Revised: 11.05.2022
Accepted: 11.05.2022

DOI: 10.21883/JTF.2022.08.52773.126-22

Bibliographic databases:

•