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Zhurnal Tekhnicheskoi Fiziki, 2022 Volume 92, Issue 8, Pages 1124–1129 (Mi jtf7405)

XXVI International Symposium "Nanophysics and nanoelectronics", N.Novgorod, 14 - 17 March 2022
Solid State

A new technology of thermoplastic glass bending for the manufacture of cylindrical surfaces of hard X-ray range mirrors

A. A. Akhsakhalyan, A. D. Akhasalyan

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia

Abstract: The paper presents a new technique for thermoplastic bending of glass. The technique makes it possible to produce cylindrical surfaces with a guide in the form of a parabola, ellipse, etc. for mirrors in the hard X-ray wavelength range ($\lambda\sim$ 0.1 nm). Three samples of the surface of an elliptical cylinder were prepared using this technique. The production time for each sample was two days. The deviation of the guide and its local angle from the calculated values for all samples does not exceed $\Delta y$ = 0.5 $\mu$m and $\Delta\alpha$ = 7 $\cdot$ 10$^{-5}$ rad, respectively. It is shown that when such surfaces are etched for two hours, their accuracy can be improved by more than two orders of magnitude ($\Delta y$ = 2 nm, $\Delta\alpha$ = 5 $\cdot$ 10$^{-7}$ rad).

Keywords: focusing X-ray mirrors, cylindrical mirrors, multilayer structures.

Received: 11.05.2022
Revised: 11.05.2022
Accepted: 11.05.2022

DOI: 10.21883/JTF.2022.08.52772.125-22



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