Abstract:
Results of experimental and numerical studies of an electric-discharge KrF laser with a specific pump power of 3.5 and 7 MW/cm$^3$ are presented; in this case, lasing was obtained with a specific radiation pulse energy of $\sim$6 and 9.5 J/l, with an internal energy efficiency of $\sim$4%. Time dependences of the formation of charged and excited particles in a dense excimer plasma with an electron concentration of ne $\sim$10$^{16}$ cm$^{-3}$ are shown. Conditions for the effective operation of the laser are proposed, which will make it possible to ensure a further increase in the specific radiation energy by more than two times while maintaining the high internal efficiency of the laser relative to the energy deposited into the discharge.
Keywords:KrF laser, diffuse discharge, specific pump power, specific radiation pulse energy, laser efficiency.