Special issue on the materials of the International Conference "Nanocarbon and Diamond" (NiA'2024)
Physical science of materials

Effect of synthesis conditions on the structure and optical properties of a-C:H films

A. P. Ryaguzov^a, A. R. Asembayeva^ab, F. Bekmurat^a, R. R. Nemkayeva^a, M. F. Kadir<sup>a

a</sup> National Nanotechnology Open Laboratory, Al-Farabi Kazakh National University, Almaty, Kazakhstan
^b Kazakh National Technical University after K. I. Satpaev, Almaty, Kazakhstan

Abstract: The results of the study on amorphous hydrogenated carbon (a-C:H) films obtained by magnetron sputtering are presented. The influence of ion-plasma discharge power on the formation of the local structure of a-C:H films was investigated using Raman scattering spectroscopy. The paper demonstrates how the synthesis conditions affect the $sp^2/sp^3$ bond ratio in the formation of the a-C:H film structure and, as a result, the change in their optical properties. The optical band gap values for a-C:H films synthesized at different discharge power levels were calculated. It was found that increasing the ion-plasma discharge power from 12 to 18 W leads to a decrease in the optical band gap from 1.8 to 1.43 eV.

Keywords: amorphous hydrogenated diamond-like carbon films, magnetron sputtering, raman spectroscopy, optical band gap.

Received: 22.11.2024
Revised: 22.11.2024
Accepted: 22.11.2024

DOI: 10.61011/JTF.2025.02.59738.420-24

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