Metal layer thickness influence on the dispersion characteristics of acoustic waves in the layered structure “Me/ZnO/Me/diamond”

Sergey I. Burkov^a, Olga P. Zolotova^b, Pavel P. Turchin^a, Vladimir I. Turchin^a, Boris P. Sorokin<sup>c

a</sup> Institute of Engineering Physics and Radio Electronics, Siberian Federal University, Svobodny, 79, Krasnoyarsk, 660041, Russia
^b Reshetnev Siberian State University of Science and Technology, Krasnoyarsky Rabochy, 31, Krasnoyarsk, 660037, Russia
^c Technological Institute for Superhard and Novel Carbon Materials, 7a Central’naya str., Moscow, Troitsk, 108840, Russia

Abstract: The research paper presents an analysis of the influence of mass loading represented by two metal layers (the upper and lower electrodes) on variations in the phase velocity of the elastic wave dispersion modes in the piezoelectric layered structure "Me/ZnO/Me/diamond" depending on the frequency and the ratio of the metal layer thickness to the piezoelectric crystalline layer thickness. Aluminum (Al), molybdenum (Mo) and platinum (Pt) are considered as the metal layer materials. It is demonstrated that variation in the elastic wave phase velocity depends on the acoustic impedance of metal layer and its thickness.

Keywords: piezoelectric layered structure, Rayleigh wave, Love wave, mass loading.

UDC: 548.0:534

Received: 07.10.2017
Received in revised form: 20.11.2017
Accepted: 25.12.2017

Language: English

DOI: 10.17516/1997-1397-2018-11-2-206-218

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