This article is cited in 3 papers

Technological features influence on magnetic sensitivity of sensor based on ferromagnetic structures

Nikolay A. Djuzhev, Aleksey S. Iurov, Nikita S. Mazurkin, Maksim Y. Chinenkov

National Research University of Electronic Technology (MIET), Shokina, 1, Moscow, Zelenograd, 124498, Russia

Abstract: Main urgent problems of the magnetic devices and primary converters development based on the magnetoresistive structures are the sensitivity improvement and thermal stability. The sensitivity was determined as the ratio of the magnitude of the output signal (imbalance voltage of the bridge under the action of magnetic field) to the magnetic field magnitude on the linear range of transfer characteristic. The investigated structures had a wide range of sensitivity values from 3.0 (mV/V)/(kA/m) to 9.4 (mV/V)/(kA/m), in the bias field value of 1 kA/m. It is established what the main influence on the sensitivity of the sensor has a width of permalloy strips. The distance between the barber pole has a substantially smaller effect.

Keywords: magnetoresistive sensor, MEMS, magnetoresistance, magnetoresistor.

UDC: 53.082.743

Received: 20.08.2016
Received in revised form: 10.10.2016
Accepted: 04.02.2017

Language: English

DOI: 10.17516/1997-1397-2017-10-2-181-185

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