MATHEMATICS. MATHEMATIC MODELING

Thin films growth control by Akar method based on van der Pol’s model

V. Yu. Kucherova

Kabardin-Balkar State University, 360004, KBR, Nalchik, 175, Chernyshevsky’s street

Abstract: Analytical procedure of synergetic synthesis of model for thin films growth from multicomponent vapour process control law providing generation of various oscillation modes of germs concentration with possibility of variation of frequency, amplitude and oscillation regimes is developed. The synthesized control law can be used for essential increase of thin films growth control efficiency in different technical applications.

Keywords: periodic oscillations, model for thin films growth from multicomponent vapour, dynamical system, control, synergetics, feedback.

UDC: 519.8

Received: 02.04.2015

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