Abstract:Background and Objectives: The problems of issues of achieving high field emission current densities 2–4 orders of magnitude lower than the limit values 10$^{15}$–10$^{16}$ A/m$^2$ are considered. Materials and Methods: Methods of obtaining them, field emission models, as well as possible emission structures providing large integrated currents in ribbon electron beams are analyzed. Results: It has been shown that the high current densities of the order 10$^{10}$–10$^{12}$ A/m$^2$ can be achieved in vacuum quantum structures with two or more potential wells during resonant tunneling. Conclusions: Obtaining high-precision sources requires nanotechnology to create heterostructures of the metal-isolator-metal type and the use of low temperatures. Amorphous glass-like diamond (GLD) is a good material for dielectric films, and conductive glasslike carbon (GLC) is a suitable material for conductive films. In fact, the technology of creating thinfilm structures such as GLD-GLC-CLD is used.