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Effects of compound diamond slurry with graphene for lapping of sapphire wafers

Hsien-Kuang Liu^a, Chao-Chang A. Chen^b, Wei-Chung Chen<sup>a

a</sup> Department of Mechanical and Computer Aided Engineering, Feng Chia University, No. 100, Wenhwa Rd., Seatwen, Taichung 40744, Taiwan
^b Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43, Keelung Rd., Sec. 4, Da’an Dist., Taipei 10607, Taiwan

Received: 07.10.2019
Accepted: 17.01.2020

Language: English

DOI: 10.1007/s00170-020-04951-5

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