This article is cited in 3 papers

Ferroelectricity

The element composition variation in lead zirconate titanate upon the ion-plasma deposition: experiment and simulation

V. A. Vol'pyas^a, A. B. Kozyrev^a, A. V. Tumarkin^a, D. M. Dolginsev^b, V. P. Pronin^b, E. Yu. Kaptelov^c, S. V. Senkevich^c, I. P. Pronin<sup>c

a</sup> Saint Petersburg Electrotechnical University "LETI"
^b Herzen State Pedagogical University of Russia, St. Petersburg
^c Ioffe Institute, St. Petersburg

Abstract: The element composition modification is experimentally studied in PZT thin films obtained via the RF magnetron sputtering with variable working gas pressure. The experimental data were interpreted through the statistic simulation of thermalization and diffusion of sprayed Pb, Zr, and Ti atoms during the ion-plasma deposition of PZT thin films. The simulation data are shown to adequately describe (within the limits of 5%) the change in element composition at various pressures of the gas environment. The study conducted enables one to produce PZT thin films with a set element composition, which is essential for optimizing the electric and physical properties of solid solutions at the morphotropic phase boundary.

Received: 21.02.2019
Revised: 21.02.2019
Accepted: 26.02.2019

DOI: 10.21883/FTT.2019.07.47838.388

 English version: Physics of the Solid State, 2019, 61:7, 1223–1227

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