This article is cited in 1 paper

International Conference ''Mechanisms and Nonlinear Problems of Nucleation, Growth of Crystals and Thin Films'' dedicated to the memory of the outstanding theoretical physicist Professor V.V. Slezov (Proceedings) St. Petersburg, July 1-5, 2019
Dielectrics

Effective charge in LiNbO$_{3}$ films fabricated by radio-frequency magnetron sputtering method

M. Sumets^a, E. Belonogov^b, V. Dybov^b, D. Serikov^b, A. Kostyuchenko^b, V. Ievlev^ac, G. Kotov<sup>d

a</sup> Voronezh State University, Voronezh, Russia
^b Voronezh State Technical University, Voronezh, Russia
^c Lomonosov Moscow State University, Moscow, Russia
^d Voronezh State University of Engineering Technologies, Voronezh, Russia

Abstract: Amorphous Li–Nb–O films were deposited onto Si substrates by radio-frequency magnetron sputtering method. The fabricated heterostructures demonstrated the presence of effective oxide charge $Q_{\operatorname{eff}}$ having both negative and positive components. Thermal annealing (TA) of as-grown heterostructures leads to the crystallization of a Li–Nb–O system with the formation of LiNbO$_{3}$ films. The $Q_{\operatorname{eff}}$ changes with TA, reaching a minimum at the annealing temperature of about 470$^\circ$C, corresponding to the entire film's crystallization.

Keywords: lithium niobate, LiNbO$_3$, sputtering, thin films, crystallization, oxide charge.

Received: 16.07.2019
Revised: 16.07.2019
Accepted: 25.07.2019

Language: English

 English version: Physics of the Solid State, 2019, 61:12, 2367–2370

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