Effect of substrate thinning on the deformation field distribution in epitaxial $\mathrm{GaAs}$ structures

V. P. Klad'ko, T. G. Kryshtab, G. N. Semenova, L. S. Khazan, O. S. Bashevskaya

Institute of Semiconductors of the Academy of Sciences of the Ukrainian SSR

UDC: 621.382.133.+548.73

Received: 12.11.1990
Revised: 07.05.1991

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