O. V. Aleksandrov, R. N. Kyutt, V. I. Prokhorov, L. M. Sorokin, “Kinetics of phosphorus solid solution decomposition in diffused <nobr>$\mathrm{Si}$</nobr> layers”, Fizika Tverdogo Tela, 1989, Volume 31, Issue 10,Pages <nobr>182

Kinetics of phosphorus solid solution decomposition in diffused $\mathrm{Si}$ layers

O. V. Aleksandrov, R. N. Kyutt, V. I. Prokhorov, L. M. Sorokin

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

UDC: 621.315.522.2

Received: 16.05.1989