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JOURNALS // Fizika Tverdogo Tela // Archive
Fizika Tverdogo Tela, 1984 Volume 26, Issue 2, Pages 632–634 (Mi ftt2689)
Short Notes

Complex-formation at phosphorus diffusion into silicon

O. V. Aleksandrov, N. V. Ashkinadze, R. Z. Tumarov


UDC: 621.315.592.3

Received: 25.05.1983
Revised: 25.10.1983



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© Steklov Math. Inst. of RAS, 2026