Short Notes

Oxidation temperature effect on mechanical stresses in $\mathrm{SiO}_{2}$ films on $\mathrm{Si}$

S. A. Litvinenko, V. I. Sokolov, N. A. Fedorovich

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

UDC: 621.382.2

Received: 04.06.1985

Bibliographic databases:

•