Small deformation measurement in thin epitaxial $\mathrm{si}$ films with photoelectron emission excited by standing X-ray wave

M. V. Koval'chuk, V. G. Kohn, È. F. Lobanovich

Institute of Cristallography of the USSR Academy of Sciences, Moscow

UDC: 548.5,548.732

Received: 09.06.1985

Bibliographic databases:

•