Abstract:
Thin films of Cd$_y$Zn$_{1-y}$O and Mg$_x$Zn$_{1-x}$O ($y$ = 0–0.35, $x$ = 0–0.45) ternary alloys have been grown by pulsed laser deposition onto sapphire substrates. The record solubility limits of Cd ($y$ = 0.3) and Mg ($x$ = 0.35) have been achieved in hexagonal zinc oxide. The mismatch of the lattice parameters a of Cd$_{0.2}$Zn$_{0.8}$O and Mg$_{0.35}$Zn$_{0.65}$O does not exceed 1%; in this case, the band gap discontinuity is 1.3 eV. The surface roughness of the films does not exceed 2.5 nm at $x$ = 0–0.27 and $y$ = 0–0.20.