This article is cited in 3 papers

Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX) (Moscow, Russia, June 19-23, 2011

Capacitor structures based on strontium titanate films

A. V. Tumarkin, M. M. Gaidukov, S. V. Razumov, A. G. Gagarin

Saint Petersburg Electrotechnical University "LETI"

Abstract: The structural properties of strontium titanate films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the phase composition of the films, the degree of perfection of the crystal structure, and the internal stresses in the lattice. The strontium titanate films deposited at a temperature of 800$^\circ$C are single-phase, have a rather perfect crystal structure, and possess minimum internal stresses. It has been shown that the capacitor structures based on oriented strontium titanate films provide a twofold decrease in the level of dielectric loss as compared to similar structures based on barium strontium titanate solid solution films at a frequency of 1.5 GHz.

 English version: Physics of the Solid State, 2012, 54:5, 968–971

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