Abstract:
Heterophase textured films of vanadium dioxide on single-crystal silicon substrates have been synthesized by the sol-gel method from solutions of triethoxyvanadyl VO(OEt)$_3$ in methyl cellosolve ÑÍ$_3$ÎÑÍ$_2$ÑÍ$_2$ÎÍ. The effect of ozone and ethanol vapor chemisorption on the parameters of the semiconductor-metal phase transition in vanadium dioxide VO$_2$(B) has been studied. It has been found that the transition temperature increases in a reducing atmosphere and decreases in an oxidizing atmosphere.