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Ferroelectricity
Degradation of the SrRuO$_3$/SrTiO$_3$ interface capacitance induced by mechanical stresses
Yu. A. Boikova,
T. Claesonb a Ioffe Institute, St. Petersburg
b Chalmers University of Technology, Göteborg, 412 58, Sweden
Abstract:
Trilayer epitaxial heterostructures in which a 700-nm-thick SrTiO
$_3$ interlayer is integrated with two SrRuO
$_3$ electrodes have been grown by laser ablation. In the top electrode, twenty contact pads (
$S\approx$ 0.1 mm
$^2$) have been formed using photolithography and ion etching. The bottom SrRuO
$_3$ electrode grown on a MgO(001) substrate is common for all film capacitors on the chip. As the temperature decreases in the range of 300–50 K, the capacitance
$C$ of the capacitors increases by a factor more than two due to an increase in the permittivity
$\varepsilon$ of the interlayer. At
$T$ = 4.2 K, as the bias voltage of
$\pm$ 2.5 V is applied to the oxide electrodes, the capacitance
$C$ decreases by
$\sim$40%. In the temperature range of 100–300 K, the ratio
$\varepsilon_0/\varepsilon$ increases almost linearly with increasing temperature (
$\varepsilon_0$ is the permittivity in vacuum). At
$T >$ 250 K, the dielectric loss tangent of the SrTiO
$_3$ interlayer increases exponentially with increasing temperature and substantially depends on the bias voltage applied to the oxide electrodes.
Received: 14.05.2014