Surface physics, thin films

Change of the structure of dielectric spectra of vanadium dioxide films in case of chromium doping

A. V. Ilinskiy^a, R. A. Castro^b, V. A. Klimov^a, A. A. Kononov^b, E. B. Shadrin<sup>a

a</sup> Ioffe Institute, St. Petersburg
^b Herzen State Pedagogical University of Russia, St. Petersburg

Abstract: It is shown that increasing the degree of chromium doping of thin VO$_2$ films leads to a decrease in the frequencies of their dielectric spectra features and to an increase in the temperature of the semiconductor-metal phase transition. Based on the Debye formula, the parameters of the dielectric spectra are calculated using the Gavrilyak-Negami function. Macroscopic and microscopic analysis of the formation mechanism of experimental dielectric spectra features was carried out. The role of Cr–Cr-dimers of increased strength in the formation of spectra of heavily doped VO$_2$:Cr film was revealed.

Keywords: VO$_2$ thin films, dielectric spectra.

Received: 07.03.2025
Revised: 09.03.2025
Accepted: 10.03.2025

DOI: 10.61011/FTT.2025.04.60556.48-25

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