Ferroelectricity

Sputtering and ripples formation by gas cluster ions on LiNbO$_3$ crystal

A. E. Ieshkin^a, T. S. Ilina^b, D. A. Kiselev^b, B. R. Senatulin^b, E. A. Skryleva^b, G. Suchaneck^c, Yu. N. Parkhomenko<sup>b

a</sup> Lomonosov Moscow State University, Moscow, Russia
^b National University of Science and Technology «MISIS», Moscow, Russia
^c Solid-State Electronics Laboratory, TU Dresden, Dresden, Germany

Abstract: The work addresses the creation of surface structures on lithium niobate single crystals. Surface topography of lithium niobate surface sputtered with gas cluster ion beams was investigated. Surface ripples induced on the surface were analyzed using power spectral density functions approach, their evolution with ion fluence and their dependence on the cluster ion energy discussed. Sputter yield value was shown to decrease with surface roughness increase, the reasons of the effect are indicated. Local piezoresponse of the rippled surface was studied.

Keywords: ferroelectrics, LiNbO$_3$ crystal, gas cluster ions, self-organization, AFM, PSD function.

Received: 22.05.2022
Revised: 22.05.2022
Accepted: 23.05.2022

DOI: 10.21883/FTT.2022.10.53095.384

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