Abstract:
The transport properties of solid-state nanopores with integrated plasmonic bow-tie antennas are studied. Plasmonic antennas were formed on “freely suspended” SiN membranes 20 nm thick. Nanopores with a diameter of $\sim$5 nm were formed in the regions between the arms of the plasmonic bow-tie antennas. Irradiation of the nanopore region with a laser with a wavelength of 632 nm leads to an increase in the level of ion current and an increase in the conductivity of the pore by 10%. Irradiation of a membrane of similar thickness without a nanopore does not lead to a sustained increase in the current level. The increase in nanopore conductivity may be associated with a change in the configuration of double electrical layers on the pore walls, as well as with local heating of the pore region caused by the presence of plasmonic structures.
Keywords:SiN membrane, plasmonic antennas, microfluidics, ion transport, optical lithography.