International Conference PhysicA.SPb/2023

Influence of oxygen on the process of formation of nanostructured films of indium-tin oxide

V. V. Acsenova, I. P. Smirnova, L. K. Markov, A. S. Pavluchenko, M. A. Yagovkina

Ioffe Institute, St. Petersburg, Russia

Abstract: In this work, the impact of oxygen presence in the working gas mixture on the formation of indium tin oxide films obtained by magnetron sputtering at high temperatures was studied. The addition of oxygen to the working mixture changes the film growth mechanism. The films grown in an oxygen-free plasma are an array of nanowires, while the films grown in an oxygen-containing medium have a weakly structured surface. According to the X-ray diffraction analysis, the films differ in preferential crystallographic orientation and its degree. The paper also compares the optical characteristics of the films under study.

Keywords: nanostructured films, ITO, transparent conducting oxides, magnetron sputtering, X-ray phase analysis.

Received: 11.05.2023
Revised: 30.07.2023
Accepted: 30.10.2023

DOI: 10.61011/FTT.2023.12.56727.5065k

Bibliographic databases:

•