Ferroelectricity

Influence of the upper electrode material on the electrophysical properties of MDM structures based on ferroelectric films

M. S. Afanasiev, D. A. Belorusov, D. A. Kiselev, G. V. Chucheva

Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences, Fryazino, Moscow oblast, Russia

Abstract: Ferroelectric films of the composition Ba$_{0.8}$Sr$_{0.2}$TiO$_3$ (BST) were synthesized on platinized silicon substrates by RF sputtering. Top electrodes made of nickel, aluminum, copper and chromium were formed on the grown films by electron beam sputtering. The results of studies of the electrophysical properties of the obtained metal-dielectric-metal (MDM) heterostructures (Me-BST-Pt-Si) are presented.

Keywords: ferroelectric BST films, metal-dielectric-metal (MDM) structures, microstructure, electrophysical properties.

Received: 28.04.2023
Revised: 28.04.2023
Accepted: 04.05.2023

DOI: 10.21883/FTT.2023.06.55666.73

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