Abstract:
Optically active silicon vacancy defects $(V_{\mathrm{Si}})$ with an electron spin $S=3/2$ in a $6H-\mathrm{SiC}/15R-\mathrm{SiC}$ silicon carbide heterostructure grown by high-temperature sublimation technique have been studied. By means of low-temperature micro-photoluminescence ($\mu$-PL) and electron paramagnetic resonance (EPR) techniques, we demonstrate the potential to generate five disparate types of $(V_{\mathrm{Si}})$ centers with distinct spectral properties in the aforementioned heterostructure using proton irradiation with $E=15$ MeV. Wherein each type of $(V_{\mathrm{Si}})$ center is defined by its zero-phonon line (ZPL) and a distinct value of spin sublevel splitting in a zero magnetic field. As a result, we have demonstrated the scalability of the number of optically active spin centers that can be enclosed within a single crystalline matrix.